@article{lopes_de oliveira furquim_rangel_durrant_2021,  title={Characterization of Plasma-deposited a-C:H:Si:F:N Films},  volume={24},  ISSN={1516-1439},  url={https://doi.org/10.1590/1980-5373-MR-2021-0016},  DOI={10.1590/1980-5373-MR-2021-0016},  journal={Materials Research},  publisher={ABM, ABC, ABPol},  author={Lopes, Juliana Feletto Silveira Costa and de Oliveira Furquim, Felipe and Rangel, Elidiane Cipriano and Durrant, Steven F.},  year={2021},  pages={e20210016} }