TY  - JOUR 
T1  - Influence of Substrate Temperature on Microstructure of Zirconium Silicon Nitride Thin Films Deposited by Reactive Magnetron Sputtering
JO  - Materials Research
A1  - Oliveira, F.S.
A1  - Dias, I.L.
A1  - Araújo, P.L.L.
A1  - Ramirez, D.A.
A1  - Silva Neto, P.C.
A1  - Hübler, R.
A1  - Mendes, F.M.T.
A1  - Damasceno, I.Z.
A1  - Tentardini, E.K.
SN  - 1516-1439
UL  - 10.1590/1980-5373-MR-2023-0235
VL  - 26 
Y1  - 2023
PB  - Brasil 
ER  -