@article{oliveira_dias_araújo_ramirez_silva neto_hübler_mendes_damasceno_tentardini_2023,  title={Influence of Substrate Temperature on Microstructure of Zirconium Silicon Nitride Thin Films Deposited by Reactive Magnetron Sputtering},  volume={26},  ISSN={1516-1439},  url={https://doi.org/10.1590/1980-5373-MR-2023-0235},  DOI={10.1590/1980-5373-MR-2023-0235},  journal={Materials Research},  publisher={ABM, ABC, ABPol},  author={Oliveira, F.S. and Dias, I.L. and Araújo, P.L.L. and Ramirez, D.A. and Silva Neto, P.C. and Hübler, R. and Mendes, F.M.T. and Damasceno, I.Z. and Tentardini, E.K.},  year={2023},  pages={e20230235} }