@article{carvalho_carvalho_silva_demarquette_2006,  title={Hydrophobic plasma polymerized hexamethyldisilazane thin films: characterization and uses},  volume={9},  ISSN={1516-1439},  url={https://doi.org/10.1590/S1516-14392006000100003},  DOI={10.1590/S1516-14392006000100003},  number={1},  journal={Materials Research},  publisher={ABM, ABC, ABPol},  author={Carvalho, Alexsander Tressino de and Carvalho, Rodrigo Amorim Motta and Silva, Maria Lúcia Pereira da and Demarquette, Nicole Raymond},  year={2006},  month={Jan},  pages={9–13} }