@article{beloto_abramof_ueda_berni_gomes_1999,  title={Plasma ion implantation of nitrogen into silicon: high resolution x-ray diffraction},  volume={29},  ISSN={0103-9733},  url={https://doi.org/10.1590/S0103-97331999000400032},  DOI={10.1590/S0103-97331999000400032},  number={4},  journal={Brazilian Journal of Physics},  publisher={Sociedade Brasileira de Física},  author={Beloto, A. F. and Abramof, E. and Ueda, M. and Berni, L. A. and Gomes, G. F.},  year={1999},  month={Dec},  pages={768–770} }