TY - JOUR T1 - Growth of CaF2 buffer on Si using low energy cluster beam deposition technique and study of its properties JO - Brazilian Journal of Physics A1 - Bhagwat, S.S. A1 - Bhangale, A.R. A1 - Patil, J.M. A1 - Shirodkar, V.S. A1 - Pinto, R. A1 - Apte, P.R. A1 - Pai, S.P. SN - 0103-9733 UL - 10.1590/S0103-97331999000200020 VL - 29 Y1 - 1999 PB - Brasil ER -