TY  - JOUR 
T1  - Electron Emission Properties of Silicon-Rich Silicon Oxide Film Prepared by Reactive Magnetron Sputtering Deposition and Rapid Thermal Annealing
JO  - Materials Research
A1  - Pang, Yan
A1  - Zhao, Wei
A1  - Li, Jie
A1  - Yuan, Yuan
A1  - Hu, Wenbo
A1  - Wu, Shengli
A1  - Li, Yongdong
A1  - Yang, Shuning
SN  - 1516-1439
UL  - 10.1590/1980-5373-MR-2019-0401
VL  - 23 
Y1  - 2020
PB  - Brasil 
ER  -