TY  - JOUR 
T1  - Effects of hot isostatic pressure on titanium nitride films deposited by physical vapor deposition
JO  - Materials Research
A1  - Carbonari, M.J.
A1  - Martinelli, J.R.
SN  - 1516-1439
UL  - 10.1590/S1516-14392001000300004
VL  - 4 
Y1  - 2001
PB  - Brasil 
ER  -