TY - JOUR T1 - Influence of the substrate bias voltage on the crystallographic structure and surface composition of Ti6A14V thin films deposited by rf magnetron sputtering JO - Brazilian Journal of Physics A1 - Alfonso, J. E. A1 - Torres, J. A1 - Marco, J. F. SN - 0103-9733 UL - 10.1590/S0103-97332006000600052 VL - 36 Y1 - 2006 PB - Brasil ER -