TY  - JOUR 
T1  - Analysis of SiO2 Thin Films Deposited by PECVD Using an Oxygen-TEOS-Argon Mixture
JO  - Brazilian Journal of Physics
A1  - Viana, Carlos E.
A1  - Silva, Ana N. R. da
A1  - Morimoto, Nilton I.
A1  - Bonnaud, Olivier
SN  - 0103-9733
UL  - 10.1590/S0103-97332001000200023
VL  - 31 
Y1  - 2001
PB  - Brasil 
ER  -