@article{viana_silva_morimoto_bonnaud_2001,  title={Analysis of SiO2 Thin Films Deposited by PECVD Using an Oxygen-TEOS-Argon Mixture},  volume={31},  ISSN={0103-9733},  url={https://doi.org/10.1590/S0103-97332001000200023},  DOI={10.1590/S0103-97332001000200023},  number={2},  journal={Brazilian Journal of Physics},  publisher={Sociedade Brasileira de Física},  author={Viana, Carlos E. and Silva, Ana N. R. da and Morimoto, Nilton I. and Bonnaud, Olivier},  year={2001},  month={Jun},  pages={299–303} }