TY  - JOUR 
T1  - Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements
JO  - Materials Research
A1  - Metcalf, Thomas
A1  - Liu, Xiao
A1  - Abernathy, Matthew Robert
SN  - 1516-1439
UL  - 10.1590/1980-5373-MR-2017-0875
VL  - 21 
Y1  - 2018
PB  - Brasil 
ER  -