@article{metcalf_liu_abernathy_2018,  title={Annealing and Extended Etching Improve a Torsional Resonator for Thin Film Internal Friction Measurements},  volume={21},  ISSN={1516-1439},  url={https://doi.org/10.1590/1980-5373-MR-2017-0875},  DOI={10.1590/1980-5373-MR-2017-0875},  journal={Materials Research},  publisher={ABM, ABC, ABPol},  author={Metcalf, Thomas and Liu, Xiao and Abernathy, Matthew Robert},  year={2018},  pages={e20170875} }