TY  - JOUR 
T1  - Two dimensional computer simulation of plasma immersion ion implantation
JO  - Brazilian Journal of Physics
A1  - Kostov, K. G.
A1  - Barroso, J. J.
A1  - Ueda, M.
SN  - 0103-9733
UL  - 10.1590/S0103-97332004000800033
VL  - 34 
Y1  - 2004
PB  - Brasil 
ER  -