@article{kostov_barroso_ueda_2004,  title={Two dimensional computer simulation of plasma immersion ion implantation},  volume={34},  ISSN={0103-9733},  url={https://doi.org/10.1590/S0103-97332004000800033},  DOI={10.1590/S0103-97332004000800033},  number={4b},  journal={Brazilian Journal of Physics},  publisher={Sociedade Brasileira de Física},  author={Kostov, K. G. and Barroso, J. J. and Ueda, M.},  year={2004},  month={Dec},  pages={1689–1695} }